Traditional semiconductor materials such as silicon substrate can no longer meet the development requirements of current electronic devices. As a typical representative of the ultra-wide band-gap semiconductor materials, AlN has excellent physical and chemical properties such as ultra-wide band-gap, high thermal conductivity, high breakdown field strength, high electron mobility, corrosion resistance, and radiation resistance, especially suitable for manufacturing radio frequency communication devices, optoelectronic devices, power electronic devices and the like. It is the best substrate for ultraviolet LED, ultraviolet detector, ultraviolet laser, high power/high-frequency electronic devices and widely used in environmental protection, electronics, wireless communication, printing, biology, medical treatment, military and other fields, such as ultraviolet purification/sterilization (sewage treatment, drinking water disinfection, air sterilization, surface sterilization, deodorization, etc.), ultraviolet curing, ultraviolet catalysis, 5G wireless communication SAW/BAW, and other devices, anti-counterfeit detection, high-density storage, medical phototherapy, drug research and development, and secret communication, ultraviolet space detection and other fields.......